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課程名稱 |
半導體製程化學與奈米分析
Semiconductor Fabrication Chemistry and Nanoanalysis |
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開課學期 |
99-2 |
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授課對象 |
理學院 化學所化學組 |
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授課教師 |
張哲政 |
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課號 |
Chem5080 |
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課程識別碼 |
223 U1130 |
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班次 |
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學分 |
3 |
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全/半年 |
半年 |
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必/選修 |
選修 |
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上課時間 |
星期二2(9:10~10:00)星期三5,6(12:20~14:10) |
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上課地點 |
新402新402 |
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備註 |
本課程中文授課,使用英文教科書。外系所學生選修需經授課教師同意。
限學士班三年級以上 且 限本系所學生(含輔系、雙修生)
總人數上限：60人 |
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Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/992sfna |
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課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
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課程大綱
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為確保您我的權利,請尊重智慧財產權及不得非法影印
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課程概述 |
本課程提供學生（大三、大四及研究生）半導體與奈米元件之基礎知識、製程技術與化學及其相關檢測之分析原理和儀器。The course provides students (junior, senior, and graduate students) some knowledge about the chemistry, techniques, fundamental concepts, and instrumentaion involved in fabricating and analyzing semiconductor and nanoelectronics devices. |
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課程目標 |
The content of the course includes semiconductor materials, silicon fab process, deposition, etching, sputtering, lithography, metallization, defect, surface modification, organic silicon interface, self-assembly, low-dimensional periodic array, field effect transistor, organic transistor, biomineralization, nanolight, nanosized optical sensor, energy and charge transfer, subwavelength diameter wire, micro machining, micro electro mechanical system, pressure sensor, temperature sensor, stirling-cycle cooler, infusion pump, actuator, accelerometer, thruster, microreactor, micro total analysis system, micromachined transductor, carbon nanotube, photocatalysts, scanning electron microscope, scanning probe microscopy, transmission electron microscopy, photoelectron spectroscopy, Auger electron spectroscopy, infrared spectroscopy, Raman spectroscopy, luminescence spectroscopy, chemical mapping, and depth profiling. |
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課程要求 |
Make-up policy
Make-up exams will not be permitted to those who miss the midterms or the final. Students should present records of clinic visits for missing the exam due to illness.
Class attendance
Good, participatory attendance is essential to successful mastery of course material. Although the attendance will not be monitored daily, it is suggested that you do not take this course if you cannot come to the class. Handouts are given only in the current class session. Students should keep class notes. Photography and videotaping of any form are not allowed in the classroom.
Honor Code
The NTU policies on cheating will be enforced. |
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預期每週課後學習時數 |
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Office Hours |
每週二 10:00~11:00
每週三 15:10~16:30 備註： The session starts right after the lecture and ends when the last student leaves. |
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指定閱讀 |
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參考書目 |
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評量方式
(僅供參考) |
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No. |
項目 |
百分比 |
說明 |
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1. |
First Exam |
23% |
The exams are primarily problems and short essays, not multiple choice. Calculators used in the exam cannot contain any dictionary function. Anyone who only sits in the class is not allowed to take the midterm or the final. |
2. |
Second Exam |
23% |
The exams are primarily problems and short essays, not multiple choice. Calculators used in the exam cannot contain any dictionary function. Anyone who only sits in the class is not allowed to take the midterm or the final. |
3. |
Final Exam |
29% |
The exams are primarily problems and short essays, not multiple choice. The final test is a comprehensive exam and will require you to integrate the class material in a meaningful way. Calculators used in the exam cannot contain any dictionary function. Anyone who only sits in the class is not allowed to take the midterm or the final. |
4. |
Oral and Written Reports |
25% |
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